TEL : (+082)70-8810-4200

FAX : (+082)42-671-7667

E-Mail : info@isacresearch.com

ADDRESS : Techno2ro 340, Tabrip-dong, Yuseong-gu, South Korea(34036)

OUR PRODUCTS

iOV Series

iPV Series

iCV Series

iRV Series

OTHER Products

 

PRODUCT

iOV Series

iOV dX3

  • (PE) ALD system

  • Reactor size : 4", 6", 8", 12"

  • Substrate shape : wafer or rectangular glass

  • Process temperature Max.< 500℃

  • 3 sets of metal organic precusor delivery lines

  • 1 set of liquid reactant delivery lines

  • Up to 4 sets of special gas reactant delivery lines.

  • PC base control (iSAC iOV Control Pro TM)

  • Automated wafer handing w/LCC

iOV cX1

  • PEALD + PECVD dual chamber

  • In-situ ellipsometry THK measurement

  • Substrate size : 6" or less

iOV dX1

  • (PE) ALD system

  • Reactor size : 4", 6", 8", 12"

  • Substrate shape : wafer or rectangular glass

  • Process temperature Max < 500℃

  • 3 sets of metal organic precusor delivery lines

  • 1 set of liquid reactant delivery lines

  • Up to 4 sets of special gas reactant delivery lines.

  • PC base control (iSAC iOV Control Pro TM)

  • Automated wafer handing w/LCC

iOV n100

  • (PE) ALD

  • Manual loading type

  • Solid precursor specific

iOV mX1

  • (PE) ALD

  • Manual loading type

  • Substrate size : 150 x 150㎟ or less

iOV fX1

  • (PE)ALD

  • Manual loading type

  • Furnace type : tube size ∅4

iOV m100

  • (PE) ALD

  • Substrate size : 150 x 150㎟ or less

  • Combined W/Powder ALD (1.5L)

iOV MX17

  • Thermal ALD

  • RT ~ 200oC

  • Multi-glass panel loading  (12 ea / batch)

  • Size : 1600 x 600 Panel

 

iPV Series

iPV dX1

  • Powder ALD

  • Fluidized bed type

  • Powder loading vol. : 100 cc

iPV dX2

  • Powder ALD

  • Fluidized bed type

  • Automated Powder Loading

  • Powder loading vol. : 2L

 
 

iCV Series

iCV mX4

  • Organic polymer deposition

  • 4 inch wafer substrate

  • Manual loading type

  • PLC control

iCV dX3

  • Organic polymer deposition

  • 300 x 300 mm substrate

  • Manual loading type

  • PC base software control

 

iRV Series

iRV dX3

  • 300mm width film

  • Transparent conductive Oxide / Metal / Oxide film production

OTHER Products

iLD  S1

  • Self cleaning of wetted liquid delivery line

  • Inert environment precursor canister exchange or refill