iOV dX3, iOV Series, isacresearch produc
iPV dx2, isacresearch product, isac prod
iCV mX4, iOV Series, isacresearch produc
iRV dX3, iRV Series, iOV Series, isacres
iLD-S1,Liquid Delivery System, LDS, iOV

OUR PRODUCTS

iOV Series

iPV Series

iCV Series

iRV Series

OTHER Products

 

PRODUCT

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iOV Series

iOV dX3

iOV dX3, iOV Series, isacresearch produc
  • (PE) ALD system

  • Reactor size : 4", 6", 8", 12"

  • Substrate shape : wafer or rectangular glass

  • Process temperature Max.< 500℃

  • 3 sets of metal organic precusor delivery lines

  • 1 set of liquid reactant delivery lines

  • Up to 4 sets of special gas reactant delivery lines.

  • PC base control (iSAC iOV Control Pro TM)

  • Automated wafer handing w/LCC

iOV cX1

iOV CX1, iOV Series, isacresearch produc
  • PEALD + PECVD dual chamber

  • In-situ ellipsometry THK measurement

  • Substrate size : 6" or less

iOV dX1

iOV dX1, iOV Series, isacresearch produc
  • (PE) ALD system

  • Reactor size : 4", 6", 8", 12"

  • Substrate shape : wafer or rectangular glass

  • Process temperature Max < 500℃

  • 3 sets of metal organic precusor delivery lines

  • 1 set of liquid reactant delivery lines

  • Up to 4 sets of special gas reactant delivery lines.

  • PC base control (iSAC iOV Control Pro TM)

  • Automated wafer handing w/LCC

iOV n100

iOV n100, iOV Series, isacresearch produ
  • (PE) ALD

  • Manual loading type

  • Solid precursor specific

iOV mX1

iOV mX1, iOV Series, isacresearch produc
  • (PE) ALD

  • Manual loading type

  • Substrate size : 150 x 150㎟ or less

iOV fX1

iOV fX1, iOV Series, isacresearch produc
  • (PE)ALD

  • Manual loading type

  • Furnace type : tube size ∅4

iOV m100

iOV m100, iOV Series, isacresearch produ
  • (PE) ALD

  • Substrate size : 150 x 150㎟ or less

  • Combined W/Powder ALD (1.5L)

iOV MX17

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  • Thermal ALD

  • RT ~ 200oC

  • Multi-glass panel loading  (12 ea / batch)

  • Size : 1600 x 600 Panel

 
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iPV Series

iPV dX1

iPV dx1, iOV Series,iPV Series isacresea
  • Powder ALD

  • Fluidized bed type

  • Powder loading vol. : 100 cc

iPV dX2

iPV dx2, iOV Series, isacresearch produc
  • Powder ALD

  • Fluidized bed type

  • Automated Powder Loading

  • Powder loading vol. : 2L

 
 
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iCV Series

iCV mX4

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  • Organic polymer deposition

  • 4 inch wafer substrate

  • Manual loading type

  • PLC control

iCV dX3

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  • Organic polymer deposition

  • 300 x 300 mm substrate

  • Manual loading type

  • PC base software control

 
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iRV Series

iRV dX3

iRV dX3, iRV Series, iOV Series, isacres
  • 300mm width film

  • Transparent conductive Oxide / Metal / Oxide film production

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OTHER Products

iLD  S1

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  • Self cleaning of wetted liquid delivery line

  • Inert environment precursor canister exchange or refill

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